SEMI International Standards Workshop:

Wafer Geometry Control for Advanced Semiconductor Manufacturing (CANCELLED)

July 15, 2015
San Francisco Marriott Marquis

The SEMI Standards Program got its start in 1973 through the industry-led development of the first standardized specification for 2" silicon wafers. Since that time, the Program has expanded into many additional fields, but wafers remain a key area of focus. Join this program to understand important developments and future needs in wafer geometry for advanced semiconductor manufacturing. Materials will be presented by leading IC fabs and key equipment companies. Proposals discussed during this workshop will be considered for standardization by the SEMI Standards Advanced Wafer Geometry Task Force under the Silicon Wafer Committee




Speakers and Topics


James Amano (SEMI) : Welcome



Jaydeep Sinha [biography] (KLA-Tencor) : Introduction





Oleg Gluschenkov [biography] (IBM) : Backside Wafer Geometry Control in Advanced Technology Nodes


Greg McIntyre [biography] (IMEC):



Kevin Turner [biography] (University of Pennsylvania) : 


Oreste Donzella [biography] (KLA-Tencor)




4:00pm Q&A



by June 5
After June 5
SEMI Member $75 $100
Non Member $100 $125



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